Transparent conducting thin films by co-sputtering of ZnO-ITO targets
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چکیده
منابع مشابه
Transparent conducting impurity-co-doped ZnO:Al thin films prepared by magnetron sputtering
This report describes the effects of impurity-co-doping on transparent conducting Al-doped ZnO (AZO) films prepared by DC magnetron sputtering using a target composed of dopant powder added to a mixture of ZnO and Al O powder. The chemical 2 3 stability of transparent conducting AZO films could be improved by co-doping Cr or Co without significantly altering the original electrical and optical ...
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ژورنال
عنوان ژورنال: physica status solidi (c)
سال: 2010
ISSN: 1862-6351,1610-1642
DOI: 10.1002/pssc.200982852